Got one but I'm not going to scrap it. :mrgreen:
But I have scrapped two transmission microscopes. That's larger machines than a SEM and they weighed in at 1800 kg each.
There can be different toxic waste in them depending on the generation of microscope. Old ones (I've seen one myself) could even have vacuum pumps based on boiling mercury and then the whole interior is probably contaminated.
Newer generations uses boiling oil in some vacuum pumps and the current generation have dry turbo molecular pumps that doesn't even contain oil except for the bearings.
Some high tension aggregates uses transformer oil and could contain PCB oils in them.
https://en.wikipedia.org/wiki/Transformer_oil#Polychlorinated_biphenyls_.28PCBs.29
Later units could contain sulfur hexafluoride as an insulator, https://en.wikipedia.org/wiki/Sulfur_hexafluoride
Except from that I think there are mostly composed of heavy iron, copper windings, brass and standard electronics.
A lot of the pumps, valves, sensors and so on can be sold as secondhand parts, I made more from the parts of the TEM I scrapped than of the metals in it.
Göran